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                    <text>1|[Page de titre]|3
1|Introduction g&amp;#233;n&amp;#233;rale|13
1|Chapitre I. Introduction|17
2|1. Int&amp;#233;gration des interconnexions en cuivre d'architecture damasc&amp;#232;ne dans les circuits int&amp;#233;gr&amp;#233;s|18
2| 2. Description des &amp;#233;tapes fabrication des lignes interconnexions en cuivre d&amp;#8217;architecture &amp;#171; double damasc&amp;#232;ne &amp;#187;&amp;#10;|21
2|Objectif du travail de th&amp;#232;se|27
2|Bibliographie du Chapitre I|28
1|Chapitre II. Principe de Polissage M&amp;#233;cano-Chimique PMC des interconnexions en cuivre d&amp;#8217;architecture damasc&amp;#232;ne|33
2|1. Aspect technique de l'&amp;#233;quipement |34
2|2. Moyens de caract&amp;#233;risation apr&amp;#232;s le PMC |40
2|3. Op&amp;#233;rations de polissage des lignes d'interconnexion cuivre |45
2|4. Influence des param&amp;#232;tres de la relation de Preston sur la vitesse d'enl&amp;#232;vement du cuivre, l'uniformit&amp;#233; |48
2|5. Conclusion|59
2|Bibliographie du Chapitre II|60
1|Chapitre III Mod&amp;#233;lisations des op&amp;#233;rations de PMC des interconnexions et r&amp;#232;gles de dessin |65
2|1. Mod&amp;#233;lisations de l'op&amp;#233;ration d'aplanissement du cuivre-Effet&amp;#171; step &amp;#187; et&amp;#171; bump &amp;#187; |66
2|2. Mod&amp;#233;lisation de l'op&amp;#233;ration de &amp;#171; r&amp;#233;v&amp;#233;lation &amp;#187; des interconnexions -Effet&amp;#171; dishillg &amp;#187; |81
2|3. Mod&amp;#233;lisations de l'op&amp;#233;ration d&amp;#8217; &amp;#171; isolation&amp;#187; de interconnexions- Effet&amp;#171; &amp;#233;rosion &amp;#187; |94
2|4. Conclusion |106
2|Bibliographie du Chapitre II|107
1|Chapitre IV. Caract&amp;#233;risation microstructurales des mat&amp;#233;riaux constituant les interconnexions en cuivre |111
2|1. D&amp;#233;termination de la texture du cuivre &amp;#233;lectrolytique des lignes d'interconnexion|112
2|2. D&amp;#233;termination du module de Young des mat&amp;#233;riaux constituant les lignes d'interconnexion |117
2|3. D&amp;#233;termination de la densit&amp;#233; du cuivre &amp;#233;lectrolytique int&amp;#233;gr&amp;#233; dans les lignes d'interconnexion|128
2|4. Conclusion |133
2|Bibliographie du Chapitre IV|134
1|Chapitre V. Formation de cavit&amp;#233; ou activation thermique dans les interconnexions en cuivre |139
2|1. Introduction |140
2|2. Caract&amp;#233;risations des cavit&amp;#233;s dans les interconnexions en cuivre|141
2|3. Hypoth&amp;#232;se de la relaxation des contraintes m&amp;#233;caniques sous activation thermique- &amp;#171; Stress voiding &amp;#187; |144
2|4. Hypoth&amp;#232;se du ph&amp;#233;nom&amp;#232;ne de densification du cuivre - Formation de cavit&amp;#233; dans les sites pr&amp;#233;f&amp;#233;rentiels |152
2|5. Conclusion g&amp;#233;n&amp;#233;rale |164
2|Bibliographie du Chapitre V |165
1|Conclusion g&amp;#233;n&amp;#233;rale|171
1|Annexes|175
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